Journal
THIN SOLID FILMS
Volume 515, Issue 9, Pages 4217-4227Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2006.02.042
Keywords
plasma processing and deposition; nucleation; boride; silicide
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Numerical analysis is conducted for the titanium-based boilde and silicide nanoparticle synthesis using an induction thermal plasma including the material evaporation process and the nanoparticle growth process with nucleation and co-condensation. Both systems present the nano-scaled particle size distributions. Ti-B system shows the smaller particle diameter, sharper distribution, larger particle number density, and wider range of the composition than Ti-Si system. Ti-Si system provides a narrower range of the silicon content due to the simultaneous co-condensation of titanium and silicon. Finally the correlation between the particle size and the nonmetal content of the synthesized nanoparticles is presented on a chart. (c) 2006 Elsevier B.V. All rights reserved.
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