Journal
APPLIED PHYSICS LETTERS
Volume 90, Issue 13, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2716344
Keywords
-
Categories
Funding
- Engineering and Physical Sciences Research Council [EP/C509765/1] Funding Source: researchfish
Ask authors/readers for more resources
Three-dimensional subsurface imaging through the back side of a silicon flip chip is reported with a diffraction-limited lateral resolution of 166 nm and an axial performance capable of resolving features only 100 nm deep. This performance was achieved by implementing sample-scanned two-photon optical beam induced current microscopy using a silicon solid immersion lens and a peak detection algorithm. The excitation source was a 1530 nm erbium:fiber laser, and the lateral optical resolution obtained corresponds to 11% of the free-space wavelength. (c) 2007 American Institute of Physics.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available