Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 16, Issue 2, Pages 213-222Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2006.889498
Keywords
atomic force microscopy (AFM); electric variables measurement; frequency response; Raman spectroscopy
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This paper investigates the electrical and thermal response of the heated atomic force microscope (AFM) cantilevers in the frequency range from 10 Hz to I MHz. Spectrum analysis of the cantilever voltage response to periodic heating distinguishes different thermal behaviors of the cantilever in the frequency domain: the cantilever voltage at low frequencies is modulated by higher-order harmonics, and at high frequencies it oscillates with 1-omega only. A simple model facilitates the understanding of complicated electrical and thermal behaviors in the cantilever, thus, it is possible to determine the cantilever temperature. The calculation predicts that temperature oscillation is restricted to the heater region when the cantilever is operated at about 10 kHz, suggesting that the periodic-heating operation of the cantilever may be employed for highly sensitive thermal metrology.
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