Journal
CHEMICAL VAPOR DEPOSITION
Volume 13, Issue 4, Pages 145-151Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/cvde.200606540
Keywords
AACVD; phase transition; thin films; vanadium oxides
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Thin films of vanadium oxides were deposited on glass by aerosol-assisted (AA) CVD from vanadium(III) acetylacetonate and vanadyl(TV) acetylacetonate. The vanadium precursor, solvent, and carrier gas flow rate determined the phase of vanadium oxide formed (V2O3, VO2, or V2O5). Films were characterized using various analytical techniques. VO2 films were analyzed at various temperatures to study their thermochromic behavior. The V2O3 reflectance-transmission plots showed a cross-over (ideal behavior for a solar-control mirror).
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