Journal
DIAMOND AND RELATED MATERIALS
Volume 16, Issue 4-7, Pages 1126-1130Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2006.11.070
Keywords
carbon nanotube; single-walled CNT; plasma-enhanced CVD; catalyst preparation; aligned
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The synthesis of dense, aligned carbon nanotubes (CNTs) on an Si substrate was achieved using microwave plasma-enhanced chemical vapor deposition. Catalytic nanoparticles were prepared on the Si substrate without a buffer layer, using pulsed arc plasma deposition, with a sintered Co and Ti composite electrode. Mixing Ti nanoparticles with Co nanoparticles prevents the formation of Co-silicides during the substrate heating process, thereby enabling fabrication of single-walled carbon nanotubes (SWNTs). In addition, catalytic nanoparticles were patterned using a liftoff method, and area-selective growth of vertical SWNTs to form organized SWNT microstructures was demonstrated. (c) 2006 Elsevier B.V. All rights reserved.
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