Journal
JOURNAL OF MATERIALS SCIENCE
Volume 42, Issue 7, Pages 2450-2454Publisher
SPRINGER
DOI: 10.1007/s10853-006-1269-z
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Sandwiched FeCuNbCrSiB/Cu/FeCuNbCrSiB films with a serpentine structure have been realized on silicon cantilever by Microelectromechanical Systems technique, and the stress-impedance (SI) effects have been studied in the frequency range of 1-40 MHz. Experimental results show that the values of SI ratio increase with the deflection and a large SI ratio of -24.1% at 5 MHz with the average tension stress 69.9 MPa and strain 0.048% is obtained in the sandwiched FeCuNbCrSiB/Cu/FeCuNbCrSiB films, which shows attractive for the applications of strain sensors.
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