Journal
MICROELECTRONICS RELIABILITY
Volume 47, Issue 4-5, Pages 686-693Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.microrel.2007.02.009
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Density functional theory is the method of choice in theoretical materials science. It has also proved to be a useful tool in device engineering, particularly at nanoscale and when novel materials are involved. In this paper, we briefly review recent theoretical results in the area of the advanced gate stack materials engineering. (C) 2007 Elsevier Ltd. All rights reserved.
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