Journal
APPLIED PHYSICS LETTERS
Volume 90, Issue 15, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2720751
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- Ministry of Education, Science & Technology (MoST), Republic of Korea [NK1430] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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Lead-free piezoelectric thick films of (K0.5Na0.5)NbO3 were fabricated by aerosol-deposition method. The thickness of KNN film was 7.1 mu m and fully dense films were obtained. The dielectric constants epsilon(T)(3)/epsilon(0) of the as-deposited and annealed films at 1 kHz were 116 and 545, respectively, which are higher than any previously reported values for lead-free piezoelectric thin/thick films, either without or with heat treatment. The ferroelectric properties were improved after annealing and the maximum values of P-r=8.1 mu C/cm(3) and E-c=100 kV/cm were achieved. These values are markedly superior to those of sintered KNN ceramic counterparts. (c) 2007 American Institute of Physics.
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