Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 135, Issue 2, Pages 593-597Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2006.07.019
Keywords
thin film sensor array; temperature sensor; strain gage; Pt; NiCr; polyimide
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Flexible arrays of resistive temperature and strain sensors have been designed, and fabricated on polyimide sheets. We describe a novel sensor design concept, utilizing materials selection combined with specific device layout design, such that both temperature and strain values can be determined from resistance values of parallel sensor pairs, regardless of complex strain fields or temperature distribution. Fabrication of thin film Pt and NiCr resistive sensor arrays, with Cu conducting lines, on polyimide demonstrates the sensing concept. Temperature and strain sensing capabilities are demonstrated for temperatures up to 200 degrees C and up to 2% tensile strain. (c) 2006 Elsevier B.V. All rights reserved.
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