Journal
APPLIED SURFACE SCIENCE
Volume 253, Issue 12, Pages 5302-5305Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2006.12.002
Keywords
r.f. magnetron sputtering; ZrC/ZrB2; multilayered coatings; nanoscale
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ZrC/ZrB2 multilayered coatings with bilayer periods ranging from 4.4 to 35.5 nm were synthesized by r.f. magnetron sputtering. X-ray diffraction, scanning electron microscopy and nanoindention were employed to investigate the microstructure and mechanical properties of the nanoscale multilayers. The results indicated that all coatings had the clear multilayered structure with mixed ZrB2(0 0 1), ZrB2(0 0 2) and ZrC(1 1 1) preferred orientations. The maximum hardness (41.7 GPa) was observed in the multilayer with 27.5-nm thick period, which is about 25% higher than the rule-of-mixture value of the monolithic ZrC and ZrB2 coatings. It also exhibited the best adhesion. Its critical load was over 70 mN. While through insert ZrB2 into ZrC layer periodically, higher residual stress built in ZrC layer can be released. (c) 2006 Elsevier B.V. All rights reserved.
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