Journal
ENGINEERING ANALYSIS WITH BOUNDARY ELEMENTS
Volume 31, Issue 5, Pages 451-457Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.enganabound.2006.11.010
Keywords
multipole accelerators; stokes flow; damping forces; MEMS
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Microflows occurring in MEMS are addressed by applying a continuum BEM code for quasi-static Stokes flow accounting for slip boundary condition. Working conditions typical of transition and rarefied flows are treated in a simplified manner by employing a viscosity corrected according to semi-analytical solutions for the linearized BGK model of Couette and Poiseuille flows. Numerical results are compared with experiments showing excellent agreement. (c) 2007 Elsevier Ltd. All rights reserved.
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