Journal
SCANNING
Volume 29, Issue 3, Pages 92-101Publisher
JOHN WILEY & SONS INC
DOI: 10.1002/sca.20000
Keywords
Monte Carlo simulation software; scanning electron microscopy; BE line scan; X-ray line scan; E-beam lithography
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Monte Carlo simulations have been widely used by microscopists for the last few decades. In the beginning it was a tedious and slow process, requiring a high level of computer skills from users and long computational times. Recent progress in the microelectronics industry now provides researchers with affordable desktop computers with clock rates greater than 3 GHz. With this type of computing power routinely available, Monte Carlo simulation is no longer an exclusive or long (overnight) process. The aim of this paper is to present a new user-friendly simulation program based on the earlier CASINO Monte Carlo program. The intent of this software is to assist scanning electron microscope users in interpretation of imaging and microanalysis and also with more advanced procedures including electron-beam lithography. This version uses a new architecture that provides results twice as quickly. This program is freely available to the scientific community and can be downloaded from the website: www.gel.usherb.ca/casino.
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