Characterization of active silicon microvalves with piezoelectric membrane actuators

We present the design, simulation, and complete characterization of an active piezo-driven silicon microvalve as applied in silicon micropumps. Therefore, the piezo-membrane actuator was studied in detail. Various test actuators were fabricated and evaluated regarding their deflection and pressure behavior. The results were compared to numerical simulations. Moreover, the fluid flow through the valve and the resulting pressure drop are modeled, simulated and experimentally analyzed with fabricated fluid flow test chips. The given data can be used to estimate, model, and design piezo-membrane actuators and microvalves. (c) 2007 Elsevier B.V. All rights reserved.