4.2 Letter

Deposition of zinc oxide layers by high-power impulse magnetron sputtering

Journal

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 25, Issue 3, Pages L19-L21

Publisher

A V S AMER INST PHYSICS
DOI: 10.1116/1.2735968

Keywords

-

Ask authors/readers for more resources

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.2
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available