Journal
ADVANCED MATERIALS
Volume 19, Issue 9, Pages 1218-+Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.200602264
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Direct 3D patterning of TiO2 with femtosecond laser pulses using a sol-gel-based negative-tone spin-coatable TiO2 resist is demonstrated (see figure). A layer of the resist was spun on glass and patterned in three dimensions by exposing it to femtosecond laser pulses and then developing in acetone. Heat treatment at 400 degrees C in air gave 3D patterns that were ca. 50 % of their original size.
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