Journal
THIN SOLID FILMS
Volume 515, Issue 13, Pages 5253-5258Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2006.12.180
Keywords
nanostructures; templates; titanium oxide; anatase; rutile
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The electrochemical formation of nanotubular titanium oxide films was investigated in 1 M H2SO4 and 0.05-0.4 wt.% HF electrolytes. Depending on anodization condition, i.e. cell voltage, anodization time, HF concentration, TiO2 porous films having different thickness (from 350 to 500 nm) and pore diameter (from 40 to 150 nm) were obtained. By varying the cell voltage from 10 V to 40 V it was possible to gradually change the crystal structure of titanium oxide from anatase to rutile. The effect of annealing temperature and duration on crystal structure was also considered. (c) 2006 Elsevier B.V. All tights reserved.
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