Coherent X-ray imaging of individual islands in GISAXS geometry

In this paper we give theoretical analysis of an image formation and reconstruction of individual islands of nano-size dimensions in the coherent GISAXS experiments. It is shown that there are some favorable conditions with incident angle close to the critical angle when GISAXS diffraction patterns originating from the individual islands can be directly inverted using iterative phase retrieval techniques. (c) 2006 Elsevier B.V. All rights reserved.