Journal
THIN SOLID FILMS
Volume 515, Issue 15, Pages 6094-6098Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2006.12.099
Keywords
Al-doped ZnO (ZnO : Al); sputtering; flexible substrate; solar cell
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Aluminum doped ZnO thin films (ZnO:Al) were deposited on glass and poly carbonate (PC) substrate by r.f. magnetron sputtering. In addition, the electrical, optical properties of the films prepared at various sputtering powers were investigated. The XRD measurements revealed that all of the obtained films were polycrystalline with the hexagonal structure and had a preferred orientation with the c-axis perpendicular to the substrate. The ZnO:Al films were increasingly dark gray colored as the sputter power increased, resulting in the loss of transmittance. High quality films with the resistivity as low as 9.7 x 10(-4) Omega-cm and transmittance over 90% have been obtained by suitably controlling the r.f. power. (C) 2007 Elsevier B.V All rights reserved.
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