Compositionally modulated ripples induced by sputtering of alloy surfaces

Sputtering of an amorphous or crystalline material by an ion beam often results in the formation of periodic nanoscale ripple patterns on the surface. In this Letter, we show that, in the case of alloy surfaces, the differences in the sputter yields and surface diffusivities of the alloy components will also lead to spontaneous modulations in composition that can be in or out of phase with the ripple topography. The degree of this kinetic alloy decomposition can be altered by varying the flux of the ion beam. In the high-temperature and low-flux regime, the degree of decomposition scales linearly with the ion flux, but it scales inversely with the ion flux in the low-temperature, high-flux regime.