Journal
SEMICONDUCTORS
Volume 41, Issue 7, Pages 845-854Publisher
MAIK NAUKA/INTERPERIODICA/SPRINGER
DOI: 10.1134/S1063782607070123
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Chemical and electrical processes developing at the semiconductor-electrolyte interface under conditions of anodic polarization were analyzed. It was shown that dense chemisorption coatings are formed on the surface of III-V crystals at voltages of pore formation onset, and a degenerate inversion layer is formed on the semiconductor side. In this case, a drop of the largest part of the applied voltage in the adsorption layer creates the prerequisites for nucleophilic substitution reactions involving chemisorbed anions and coordination-saturated atoms under the crystal surface. The mechanisms of these reactions were considered as applied to sphalerite-structured crystals. The results of experimental studies of the structures and compositions of porous layers in III-V crystals formed in various electrolytes at various polarization voltages are explained on the basis of the obtained concepts.
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