4.7 Article Proceedings Paper

Thermal oxidation of single crystalline aluminum nitride

Journal

MATERIALS CHARACTERIZATION
Volume 58, Issue 8-9, Pages 672-679

Publisher

ELSEVIER SCIENCE INC
DOI: 10.1016/j.matchar.2006.11.013

Keywords

high resolution transmission electron microscopy; electron energy loss spectroscopy; oxidized aluminum nitride; stacking faults; dislocations

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