Journal
JOURNAL OF ELECTRON MICROSCOPY
Volume 56, Issue 4, Pages 145-151Publisher
OXFORD UNIV PRESS
DOI: 10.1093/jmicro/dfm007
Keywords
image resolution; noise; contrast-to-gradient; scanning electron microscope
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The contrast-to-gradient (CG) resolution has been defined as a weighted harmonic mean of the local resolution, i.e. the length defining the objects local fine structure at each pixel position. The newly defined resolution Res is defined as 2 sigma/root 2, where 2 sigma is a sharpness factor of the image pattern obtained by the conversion 2 sigma =AR(CG) + B using default constants A and B. In the present study, we have extended the algorithm to change the constants from default values to calibrated ones using standard images that are same in both pattern and contrast-to-noise ratio (CNR) as the original SEM image to be evaluated. The calibrated image resolution with a weak noise dependency is evaluated with the CNR as a given parameter.
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