Preparation and properties of a high temperature, flexible and colorless ITO coated polyimide substrate

A new high temperature, flexible and colorless indium-tin-oxide (ITO) coated plastic substrate has been prepared from a thermally stable, high glass transition temperature (T-g) and colorless polyimide film. The polyimide was synthesized from 3,3'-diaminodiphenylsulfone (3,3'-DDS) and 4,4'-(hexafluoroisopropylidene) diphthalic anhydride (6FDA) monomers. Its heat distortion temperature was 278 degrees C. The ITO was deposited on the polyimide film using the magnetron-sputtering process. After annealing at 250 degrees C under nitrogen for 1 h, the resistivity of the ITO film was 4.0 x 10(-4) Omega cm, and its transmittance was 83.5%. Scanning electron microscope (SEM) and X-ray diffraction (XRD) were used to observe the surface and morphology of the ITO film. UV-visible spectroscopy and the four-probe method were used to study their optical and electrical properties. The high performance ITO-plastic substrate can be used in the next generation flat panel displays. (c) 2007 Elsevier Ltd. All rights reserved.