Journal
TOPICS IN CATALYSIS
Volume 45, Issue 1-4, Pages 105-109Publisher
SPRINGER/PLENUM PUBLISHERS
DOI: 10.1007/s11244-007-0248-1
Keywords
indium oxide; nanoparticles; gold; catalytic effect; capacitive sensors; MIS gas sensors; gas detection; NOx; CO; NH3; C(3)H6
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A series of gas sensing layers based on indium oxide doped with gold were prepared by using the aerosol technology for deposition as the active contact layer in a metal oxide semiconductor capacitive device. The interaction between the measured species and the insulator surface was quantified as the voltage changes at a constant capacitance of the device. The sensor properties were investigated in the presence of H-2, CO, NH3, NO, NO2 and C3H6 at temperatures between 100-400 degrees C. Significant differences in the morphology of the layer and its sensitivity were noted for different preparation methods and different gas environments.
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