Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 261, Issue 1-2, Pages 508-511Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.nimb.2007.04.058
Keywords
mass spectrometry; laser post-ionization; SIMS; SNMS; useful yield
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The potential of ion sputtering based mass spectrometry applied to materials characterization on the nanometer scale is discussed. Analytical approaches and required instrumental capabilities are outlined, and the current state-of-the-art is summarized. A new generation of analytical instruments specifically optimized for laser post-ionization secondary neutral mass spectrometry has been developed at Argonne National Laboratory (ANL). Experimentally verified (or anticipated after near-future upgrades) analytical capabilities of these instruments, capable of quantitative analysis at the nanometer-scale, are reported and compared to secondary ion mass spectrometry. (c) 2007 Published by Elsevier B.V.
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