Journal
ANALYTICAL AND BIOANALYTICAL CHEMISTRY
Volume 393, Issue 2, Pages 427-429Publisher
SPRINGER HEIDELBERG
DOI: 10.1007/s00216-008-2212-8
Keywords
Mass spectrometer; Mass filter; Microelectromechanical systems
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Mass filters for miniature mass spectrometers are now being constructed using three-dimensional microfabrication techniques. Crossed-field, travelling-wave, time-of-flight, quadrupole and cylindrical ion-trap filters have all been demonstrated, with steadily increasing mass range and mass resolution. This paper reviews the range of available devices and the state of the art.
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