Journal
APPLIED PHYSICS LETTERS
Volume 91, Issue 6, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2769753
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Electron energy-loss spectroscopy at subnanometer resolution is used to investigate CoFeB/MgO/CoFeB magnetic tunnel junctions grown by electron-beam evaporation and radio frequency (rf) sputtering before and after annealing. Gap states were observed in the MgO layer for both growth methods although the rf-sputtered MgO layer showed significantly more gap states. Asymmetry in oxygen bonding between the top and bottom CoFeB/MgO interfaces was also observed. Moreover, significant amounts of diffused B as BOx were observed in the rf-sputtered MgO layer. A Mg underlayer between the MgO layer and the bottom electrode greatly reduced BOx formation in the barrier upon annealing. (c) 2007 American Institute of Physics.
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