Journal
PLASMA PROCESSES AND POLYMERS
Volume 4, Issue 6, Pages 638-647Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.200700043
Keywords
diffusion; nanostructures; nucleation; plasma nanofabrication; quantum dots
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The controlled growth of ultra-small Ge/Si quantum dot (QD) nuclei (approximate to 1 nm) suitable for the synthesis of uniform nanopatterns with high surface coverage, is simulated using atom-only and size non-uniform cluster fluxes. It is found that seed nuclei of more uniform sizes are formed when clusters of non-uniform size are deposited. This counter-intuitive result is explained via adatom-nanocluster interactions on Si(100) surfaces. Our results are supported by experimental data on the geometric characteristics of OD patterns synthesized by nanocluster deposition. This is followed by a description of the role of plasmas as non-uniform cluster sources and the impact on surface dynamics. The technique challenges conventional growth modes and is promising for deterministic synthesis of nanodot arrays.
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