Normal vector method for convergence improvement using the RCWA for crossed gratings

The rigorous coupled wave analysis (RCWA) is a widely used method for simulating diffraction from periodic structures. Since its recognized formulation by Moharain et al. [J. Opt. Soc. Am. A 12, 1068 and 1077 (1995)], there still has been a discussion about convergence problems. Those problems are more or less solved for the diffraction from line gratings, but there remain different concurrent proposals about the convergence improvement for crossed gratings. We propose to combine Popov and Nevieres formulation of the differential method [Light Propagation in Periodic Media (Dekker, 2003) and J. Opt. Soc. Am. A 18, 2886 (2001)] with the classical RCWA. With a suitable choice of a normal vector field we obtain a better convergence than for the formulations that are known from the literature. (c) 2007 Optical Society of America.