Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 54, Issue 9, Pages 2183-2190Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2007.902880
Keywords
band structure; MOS devices; shear strain; strain/stress; strained-silicon (Si); surface mobility
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A model capturing the effect of general strain on the electron effective masses and band-edge energies of the lowest conduction band of silicon is developed. Analytical expressions for the effective mass change induced by shear strain and valley shifts/splittings are derived using a degenerate k center dot p theory at the zone-boundary X point. Good agreement to numerical bandstructure calculations using the nonlocal empirical pseudopotential method with spin-orbit interactions is observed. The model is validated by calculating the bulk electron mobility under general strain with a Monte Carlo technique using the full-band structure and the proposed analytical model for the band structure. Finally, the impact of strain on the inversion-layer mobility of electrons is discussed.
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