Journal
ULTRAMICROSCOPY
Volume 107, Issue 9, Pages 726-733Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.ultramic.2007.02.032
Keywords
instrumental design; tomographic atom probe; wide-angle geometry; laser-assisted field evaporation
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Currently atom probe tomography provides the highest spatial resolution compared to all other volume analysis techniques. Owing to its single atom sensitivity, it is specially suited to study nano-structured materials. Therefore, a new atom probe was installed at the Institute for Material Physics at University of Muenster, Germany, to study thin film reactions. Since the available budget was rather limited, a cost-effective non-commercial atom probe was constructed. The instrument is based on a 2D delay line detector system of 120 mm diameter. To achieve a large collecting angle and thus large volumes of analysis, a straight flight tube without a reflectron is used. This way, the flight distance may be reduced down to 160 mm. However, the variable chamber layout allows using a reflectron as an alternative. Furthermore, a laser system is implemented that delivers pulses in the 500 ps range to make possible laser-assisted evaporation of atoms. The article describes instrumental details and presents first characteristic data. (c) 2007 Elsevier B.V. All rights reserved.
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