Journal
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS
Volume 27, Issue 5-8, Pages 1504-1508Publisher
ELSEVIER
DOI: 10.1016/j.msec.2006.06.006
Keywords
ALD; nanomaterials; nanolaminates; nanofibers; nanotubes; porous materials; thin films
Categories
Ask authors/readers for more resources
In making and modifying nanomaterials conformality is a prerequisite for the thin film deposition method. From its principle ALD is an ideal method for coating nanomaterials. In this paper the use of ALD for making nanostructured materials is exemplified by many ways: making of nanolaminates, deposition of thin films inside nanopores, as well as coating of nanofibers and nanorods. The materials deposited by ALD are mostly oxides, nitrides and metals. (C) 2006 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available