Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 139, Issue 1-2, Pages 36-41Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2006.11.010
Keywords
SERS; molecular detection; ordered-nanostructures; CMOS
Ask authors/readers for more resources
Systematically arranged arrays of nanostructures were realized using CMOS compatible silicon technologies. The ordered arrays of nanostructures were formed using DUV photolithography, reactive ion etching and physical vapour deposition of silver. By varying the lithography dosage, arrays having different distance of closest a proach between adjacent nanostructures are created. The nanostructures also have sharp edges to bring about a further enhancement to the local electromagnetic field. In comparison with other methods of preparing SERS substrate, our method provides advantages of high uniformity and high sample throughput. The Raman spectrum of Rhodarnine 6G (R6G) molecules is characterized on our C C, substrates. The substrates with the smaller distance between adjacent nanostructures show the greater enhancement. R6G with concentration up to 1 mu M was detected using SERS substrates fabricated. (c) 2006 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available