Journal
SURFACE & COATINGS TECHNOLOGY
Volume 201, Issue 22-23, Pages 9041-9045Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2007.05.026
Keywords
CVD; zirconia; haftna; tin oxide; combinatorial
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Using anhydrous metal nitrates as single source precursors, combinatorial chemical vapor deposition was used to create compositional gradients in the bimetallic ZrO2/HfO2 system and the trimetallic ZrO2/HfO2/SnO2, system. Composition and structural information were probed simultaneously by measuring the fluorescence and diffraction resulting from exposure of the film to a 30 mu m diameter X-ray beam at the Advanced Photon Source. The higher resolution made possible by the small beam size provided an accurate map of composition and structure. In the homologous zirconia-hafnia series a decrease in lattice constants and a change in film texture was observed as a function of increased Hf concentration. As reported elsewhere, at intermediate compositions, gradients involving ZrO2 and SnO2 or HfO2 and SnO2 give rise to a crystalline phase(alpha-PbO2 structure type) that differs from that found for either of the end members. The simultaneous measurement of fluorescence and diffraction coupled with the small spot X-ray source provides a more accurate correlation between composition and structure. (c) 2007 Elsevier B.V. All rights reserved.
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