Journal
SURFACE & COATINGS TECHNOLOGY
Volume 201, Issue 22-23, Pages 9243-9247Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2007.05.019
Keywords
calcium copper titanate; perovskite; MOCVD; dielectric; thin films
Ask authors/readers for more resources
Calcium copper titanate, CaCU3Ti4O12 (CCTO), thin films have been fabricated by Metal Organic Chemical Vapor Deposition (MOCVD) on LaAlO3(100) single crystal substrates. Depositions have been carried out from a molten mixture consisting of the Ca(hfa)(2)center dot tetraglyme, Ti(tmhd)(2) (O-iPr)(2), and Cu(tmhd)(2) [Hhfa=1,1,1,5,5,5-hexafluoro-2,4-pentanedione; tetraglyme=2,5,8,11,14-pentaoxapentadecane; Htmhd=2,2,6,6-tetramethyl-3,5 -heptandione; O-iPr=iso-propoxide] precursors. Post-deposition annealing treatments have been performed at 1100 degrees C for long time (24 h) as well as by rapid thermal annealing (RTA) processes. Since structural and chemical properties of CCTO ceramics greatly affect the resulting dielectric properties, accurate structural, morphological and compositional characterizations of the annealed samples have been performed by X-ray diffraction, field emission scanning electron microscopy (FE-SEM) and energy dispersive X-ray analysis (EDX). Oriented films have been obtained after both long time annealings and RTA processes, while different morphologies have been observed: similar to 600 run wide rounded grains and very large (similar to 5 pm) squared grains, respectively. (c) 2007 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available