☆ 4.6 Article

Detection of Cs2Ge+ clusters for the quantification of germanium atoms by secondary ion mass spectrometry:: Application to the characterization of Si1-xGex layers (0≤x≤1) and germanium diffusion in silicon

JOURNAL OF APPLIED PHYSICS (2007)

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Detection of Cs2Ge+ clusters for the quantification of germanium atoms by secondary ion mass spectrometry:: Application to the characterization of Si1-xGex layers (0≤x≤1) and germanium diffusion in silicon

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