4.6 Review

The potential of porous silicon gas sensors

Journal

CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE
Volume 11, Issue 5-6, Pages 92-100

Publisher

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.cossms.2008.06.003

Keywords

Porous silicon; Gas sensor; Nanostructure modification; Photoluminescence

Funding

  1. NIRT [CTS-0608896]

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Recent developments in porous silicon gas sensors have been reviewed. Monitored species detection levels, and the mechanisms of sensing for different sensor designs are also discussed. Porous silicon surface modification methods have been employed for detecting different gas molecules; H2O, ethanol, methanol, isopropanol, COx, NOx, NH3, O-2, H-2, HCl, SO2, H2S and PH3. (C) 2008 Elsevier Ltd. All rights reserved.

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