Journal
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY
Volume 21, Issue 10, Pages 1477-1482Publisher
KOREAN SOC MECHANICAL ENGINEERS
DOI: 10.1007/BF03177362
Keywords
injection molding; hot embossing; microfabrication; MEMS
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In recent years, plastics have begun to show great commercial potential especially in manufacturing micro-structured parts. Injection molding and hot embossing are two major microfabrication methods. Replication accuracy was investigated for these two methods. Polymethyl methacrylate (PMMA) was used as the polymer substrate. The mold insert (or master) was fabricated by LIGA-type method. In this study, hot embossing was found to have better replication accuracy for microstructure than injection molding. Experiments were also conducted to study the effects of process parameters on the replication quality.
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