Journal
FRONTIERS OF MECHANICAL ENGINEERING
Volume 2, Issue 4, Pages 463-467Publisher
HIGHER EDUCATION PRESS
DOI: 10.1007/s11465-007-0080-0
Keywords
tribo-electrochemistry; corrosive wear; friction control; tribo-electrochemical polishing
Categories
Ask authors/readers for more resources
In this paper, the status quo and recent progress in the research on tribo-electrochemistry in aqueous and non-aqueous media, respectively, are reviewed. Much more attention has been paid to the tribo-electrochemical mechanisms for the control of friction and wear. Based on a summary of the conventional polishing principles of hard and brittle materials, the tribo-electrochemical polishing method is proposed. The results of the preliminary test show that tribo-electrochemical polishing is promising to become a critical technology in the high efficient polishing and planarization of microelectronic materials.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available