Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 25, Issue 6, Pages 2184-2187Publisher
A V S AMER INST PHYSICS
DOI: 10.1116/1.2779049
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The authors demonstrate that silicon nitride membranes can be folded out of plane into three-dimensional structures by helium ion implantation. The folds have a radius of 1 mu m and can be directed both up or down by varying implant energy. (c) 2007 American Vacuum Society.
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