Journal
SENSORS
Volume 7, Issue 11, Pages 2539-2547Publisher
MOLECULAR DIVERSITY PRESERVATION INT
DOI: 10.3390/s7112539
Keywords
love wave; SU-8; SU-8 guiding layer; SH-SAW
Ask authors/readers for more resources
SU-8 is a technologically important photoresist used extensively for the fabrication of microfluidics and MEMS, allowing high aspect ratio structures to be produced. In this work we report the use of SU-8 as a Love wave sensor guiding layer which allows the possibility of integrating a guiding layer with flow cell during fabrication. Devices were fabricated on ST-cut quartz substrates with a single-single finger design such that a surface skimming bulk wave (SSBW) at 97.4 MHz was excited. SU-8 polymer layers were successively built up by spin coating and spectra recorded at each stage; showing a frequency decrease with increasing guiding layer thickness. The insertion loss and frequency dependence as a function of guiding layer thickness was investigated over the first Love wave mode. Mass loading sensitivity of the resultant Love wave devices was investigated by deposition of multiple gold layers. Liquid sensing using these devices was also demonstrated; water-glycerol mixtures were used to demonstrate sensing of density-viscosity and the physical adsorption and removal of protein was also assessed using albumin and fibrinogen as model proteins.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available