Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 17, Issue 11, Pages 2360-2365Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/17/11/025
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Self-assembled peptide nanotubes are unique, newly developed nano-structures which exhibit many exciting properties that may establish them as preferred nano-technological building blocks, especially for nano-fluidics, biological sensing and self-assembly applications. Integrating peptide nanotube materials in standard micro-fabrication processes is inhibited by some of their specific characteristics, which make them susceptible to some of the chemicals used in standard lithography. Here, we present an adjusted photo-lithography compatible scheme that allows the integration of these novel new nano-materials in batch processing techniques. Specifically, a scheme for creating nano-fluidic channels using peptide nanotubes, as well as contacting nanotubes to electrodes, is demonstrated. In addition, some of the incompatible fabrication methods are delineated. The modified micro-fabrication processes described here can be extended to other types of sensitive nano-materials.
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