Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 25, Issue 6, Pages 1489-1492Publisher
A V S AMER INST PHYSICS
DOI: 10.1116/1.2778689
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Polycrystalline Fe3O4 films grown on different thicknesses of Fe underlayers were prepared by dc reactive-magnetron sputtering in an Ar+O-2 gas mixture and annealing under an infrared-lamp furnace system. Analyses of structural and magnetic properties revealed that a 15 nm Fe underlayer can be oxidized to Fe3O4 by increasing the oxygen flow crates during initial Fe3O4 layer growth. These analyses also confirmed the stoichiometry and high-crystallographic quality of grown Fe3O4. Adopting this method, Fe3O4 films can be grown without any other elemental buffer layers. (c) 2007 American Vacuum Society.
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