Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 140, Issue 2, Pages 168-175Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2007.06.028
Keywords
shadow mask; stencil; polymers; thermal conductivity; three omega; metal deposition
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Pattern deposition of metals with controlled and microscale dimensions can be a challenging task if traditional photolithography is not a practical option. This is a particularly valid concern for the case of certain polymer substrates, which are gaining in importance in the microelectronics and related industries. Therefore, a novel design and process flow for batch fabricating low cost reusable silicon shadow masks was developed. Of note was the corner compensation scheme employed to avoid over-etching of the convex corners in the design. These shadow masks enabled deposition of metals or other suitable materials with feature sizes ranging from approximately 3 to 250 mu m and were successfully utilized to form patterned metal heater lines and pads on various samples. The heaters, required for conducting thermal conductivity measurements of the underlying films/substrates using the three omega (3 omega) method, showed resistance-temperature linearity, confirming theoretical estimates to within similar to 0.2%. Moreover, the room temperature thermal conductivity of an amorphous SiO2 film as well as a polyaniline thick film were measured, further validating the deposition through shadow mask technique. (c) 2007 Elsevier B.V. All rights reserved.
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