In situ probing of the growth and morphology in electron-beam-induced deposited nanostructures

Three series of nanofiber structures were grown via electron-beam-induced deposition as a function of beam energy (1, 5 and 20 keV) using a W( CO) 6 precursor. At each beam energy a time series ranging from 0.5 to 128 s was performed and the sample current during each growth was monitored versus growth time. The subsequent current traces have been correlated to the nanostructure morphology. For the 1 and 5 keV beam energy, two distinct lateral growth regimes were observed. Initially there is a rapid base broadening consistent with the electron beam interaction region. Secondly, a lateral 'platelet' type growth was observed. At 20 keV beam energy, there is an initial rapid broadening: however, no 'platelet' growth is observed. For each beam energy, the measured current trace is correlated to the observed growth regimes.