Journal
IEEE TRANSACTIONS ON NUCLEAR SCIENCE
Volume 54, Issue 6, Pages 2463-2467Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TNS.2007.910040
Keywords
insulators; low temperature; micro-electro-mechanical system; total ionizing dose
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Total ionizing dose (TID) measurements at low temperature (60 K) of a Micro-Electro-Mechanical System (MEMS) Microshutter Array (MSA) indicate that exposing the MSA to ionizing radiation causes some of the shutters to stop operating properly. The number of non-functional shutters depends on the applied bias. With increasing dose, the number of micro-shutters that become non-functional increases.
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