Journal
ULTRAMICROSCOPY
Volume 108, Issue 1, Pages 17-28Publisher
ELSEVIER
DOI: 10.1016/j.ultramic.2007.02.026
Keywords
STEM; depth sectioning; nonlocality; electron energy loss spectroscopy
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Recent and ongoing improvements in aberration correction have opened up the possibility of depth sectioning samples using the scanning transmission electron microscope in a fashion similar to the confocal scanning optical microscope. We explore questions of principle relating to image interpretability in the depth sectioning of samples using electron energy loss spectroscopy. We show that provided electron microscope probes are sufficiently fine and detector collection semi-angles are sufficiently large we can expect to locate dopant atoms inside a crystal. Furthermore, unlike high angle annular dark field imaging, electron energy loss spectroscopy can resolve dopants of smaller atomic mass than the supporting crystalline matrix. (c) 2007 Elsevier B.V. All rights reserved.
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