Journal
MICROSCOPY AND MICROANALYSIS
Volume 13, Issue 6, Pages 428-436Publisher
CAMBRIDGE UNIV PRESS
DOI: 10.1017/S1431927607070845
Keywords
atom probe tomography; specimen preparation; focused ion beam
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Several FIB-based methods that have been developed to fabricate needle-shaped atom probe specimens from a variety of specimen geometries, and site-specific regions are reviewed. These methods have enabled electronic device structures to be characterized. The atom probe may be used to quantify the level and range of gallium implantation and has demonstrated that the use of low accelerating voltages during the final stages of milling can dramatically reduce the extent of gallium implantation.
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