Journal
APPLIED PHYSICS LETTERS
Volume 91, Issue 24, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2824812
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The effect of uniaxial tensile strain parallel to the channel on mobility of polycrystalline silicon thin-film transistors (TFTs) on stainless steel foil has been investigated. The electron mobility increases by 20% while the hole mobility decreases by 6% as the strain increases to 0.5%, and both followed by saturation as the strain increases further. The off current decreases for both types of TFTs under strain. All TFTs remained functional at the applied strain of 1.13%. (c) 2007 American Institute of Physics.
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