Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 40, Issue 24, Pages 7652-7655Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0022-3727/40/24/009
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The problem of simultaneously enhancing sensitivity and noise immunity of microcantilevers is investigated. The dependence of deflection and resonant frequency of a microcantilever on its dimensions is studied. A principle to increase deflection and resonant frequency simultaneously is established. Several cantilevers agreeing with this principle are investigated using analytical models and are compared with FEM simulations. Using these results, a cantilever profile that achieves a larger deflection and a larger resonant frequency compared with uniform cantilevers is proposed to be used in sensor elements.
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